Web7 Jun 2000 · The effects of substrate resistivity on RF component and circuit performance. Abstract: The benefits of using high-resistivity substrates for RF CMOS applications are … Web1 Feb 2000 · In the commonly used substrate resistivity range, the substrate loss increases with decreasing resistivity. ... ... For p + substrates, the inductance slightly decreases, …
RF MEMS Passives on High-Resistivity Silicon Substrates
Sheet resistance is a special case of resistivity for a uniform sheet thickness. Commonly, resistivity (also known as bulk resistivity, specific electrical resistivity, or volume resistivity) is in units of Ω·m, which is more completely stated in units of Ω·m 2 /m (Ω·area/length). See more Sheet resistance, is the resistance of a square piece of a thin material with contacts made to two opposite sides of the square. It is usually a measurement of electrical resistance of thin films that are uniform in … See more A four-point probe is used to avoid contact resistance, which can often have the same magnitude as the sheet resistance. Typically a constant current is applied to two probes, and the … See more • ESD materials See more Sheet resistance is applicable to two-dimensional systems in which thin films are considered two-dimensional entities. When the term sheet resistance is used, it is implied that the current is along the plane of the sheet, not perpendicular to it. In a regular three … See more Sheet resistance measurements are very common to characterize the uniformity of conductive or semiconductive coatings and materials, e.g. for quality assurance. Typical applications … See more Web1 Sep 2006 · This work investigates the loss characteristic of silicon substrate with different resistivities and distinguishes theoretically and experimentally the dielectric losses into … patri aragoneses
Low- and high-resistivity silicon substrate characterization using …
Web8 May 2024 · In this Letter, we demonstrate the impact of the silicon wafer resistivity on the frequency performance of the HPT. The opto-microwave (OM) responsivities of the HPTs … Web8 May 2024 · The phototransistor based on low-resistivity (LR) silicon substrate provides a responsivity of more than double compared to the phototransistor based on a high-resistivity silicon substrate that is fabricated by using … Web21 Apr 2005 · ABSTRACT High-resistivity silicon substrates (HRS, N B < 10 14 cm − 3) are commonly used, especially in optoelectronic integrated circuits. However, standard metal oxide semiconductor (MOS) characterization methods fail to predict correctly the dopant concentration and lifetime. patriarca maintenance service